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 MS481, M-W  10:30-11:45, #2425

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 3-0-3

Text

  Introduction to Microelectronic Fabrication by Richard Jaeger

  Volume 5 of Modular Series on Solid State Devices (2nd Edition)

Objective

 To present the basic background of semiconductor process.

 The students understand the theory, materials and design of semiconductor process.

Grading Policy

 

    Quiz   

25%

Final

50%

HW

15%

Class conduct

10%

 

Course schedule

 

Week
Topic

1

Overview of MOSFET theory

2

Device Physics for the Submicron MOSFET:

Scaling theory & Short channel effect & 3D Tr

3

Introduction to TCAD Physics

Semiconductor Design using TCAD Simulation

4

CMOS Process Integration

5

Unit Process: Crystal Growth

6

Unit Process: Oxidation & Diffusion

7

Unit Process: Ion Implantation

8

Quiz

9

Semiconductor Process Design using TCAD Simulation

10

Unit Process: Lithography

11

Unit Process: Dry Etch

12

Unit Process: Film Deposition

13

Unit Process: High K/Metal Gate

14

Unit Process: Contact & Metallization & S/D Engineering

15

Unit Process: Electronic Packaging & Assembly

16

Final exam

 

Recent Student's Class Evaluation

MS 481 ݵü (2015 )

MS 415 ݵü (2015 )

  HW & Notes

 Members only