RESEARCH

RESEARCH

Semiconductor MemoryFlexible Large Scale Integration (f-LSI)

    Silicon-based semiconductors have played significant roles of signal processing, nerve stimulation, memory storage, and wireless communication in implantable electronics. However, the rigid and bulky LSI chips have limited its uses in invivo and flexible devices.

     We has developed silicon-based flexible large scale integrated circuits (LSI) for bio-medical applications.We fabricated flexible LSI  interconnected with thousand nano-transistors on silicon wafer by state-of-the-art 0.18 CMOS process, and then the entire bottom substrate except top 100 nm active circuit layer was removed by wet chemical etching. This work could provide an approach to flexible LSI for an ideal artificial retina system and other bio-medical devices. Also the result represents an exciting technology with the strong potential to realize fully flexible consumer electronics such as application processor (AP) for mobile operating system, high-capacity memory, wireless communication in the near future.


[Related References]

"Simultaneous Roll Transfer and Interconnection of Flexible silicon NAND Flash Memory" Adv. Mater., 28, 8371, 2016 

"ACF Packaged Flexible NAND Flash Memory" IEDM, Washington DC, 19.3, 1, 2015 

"Flexible Crossbar Resistive Memory Arrays via Inorganic-based Laser Lift-off "  Adv. Mater., 26, 7480, 2014

"In vivo Silicon-Based Flexible Radio Frequency Integrated Circuits Monolithically Encapsulated with Bio-compatible Liquid Crystal Polymers" ACS Nano, 7(5), 4545, 2013.  

이용약관 ㅣ개인정보처리방침

Department of Materials Science and Engineering, KAIST ㅣ Fax: 82-42-350-3310 ㅣ TEL: 82-42-350-3343 ㅣAddress : 291 DaeHak-ro, Yuseong-gu, Daejeon, Korea, 34141 (대전 유성구 대학로 291)


Copyright  © 2021. KAIST. All rights reserved.

Department of Materials Science and Engineering, KAIST

Fax: 82-42-350-3310 ㅣ TEL: 82-42-350-3343 ㅣ

Address : 291 DaeHak-ro, Yuseong-gu, Daejeon, Korea, 34141 (대전 유성구 대학로 291)


Copyright  © 2021.KAIST. All rights reserved.